Perform routine preventive maintenance per schedule and MMM (Manufacturing Maintenance Manual) procedures for assigned tool set. Document routine preventive maintenance on PM checklists, record data if applicable and maintain completed checklist/history in tool logbook. Troubleshoot and repair routine unscheduled failures to root cause and select correct down code when closing out call for Equipment Engineer to improve MTBF (Mean-Time Between Failure). Document routine preventive maintenance and unscheduled failures on Resource Viewer and Forum Notes equipment manufacturing tracking system and database. Provide inputs to Shift Manager, Lead and/or Equipment Engineer to improve PM cycle-time, tool availability, quality/workmanship, reduce wafer scrap and cost of ownership. Provide Technical training and certification for maintenance personnel. Support Tool Owner and Equipment Engineer to define and write preventive maintenance procedures.