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Technician 3, Engineering

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Location: Fremont, CA, United States 
Req ID: JR-0000039248

Description

Perform basic operation of different CMP tools in both manual and automatic mode. Perform basic operation of metrology tools. Perform non-standard process as long as process recipe is provided/CRMS is created by PE. Good understanding of SPC chart and how to react to different warnings according to SPEC/OCAP. Disposition hold wafer according to SPEC or disposition criteria provided by PE. Capable of usingĀ  IT-related application/software such as APC, Plating Report, MITECS, GS3, TSD report, EDCSPC, SPC chart, Fabtime, etc. Notify PE/MFG if there's any suspected excursion. Understand CMP process. Train DMTs with new process/tool. Support team project. Should know how to create future hold msg, attach and release hold. Operation. Primary and backup tool allocation for each layer in CMP. Hold reasoning in detail. SPC chart non-conformances and reasoning. CMP Equipment. Understand consumable. Understanding MIRRA config, zones, presssure, etc. Understanding of carrier build on NTEGs. Understanding Ebara configuration, top ring, dresser build and overall tool function. Clear understanding of DNS, SSEC and Ebara cleaning tool configuration and recipe principals. Slurry configuration on the tools. Cleaning chemicals on the tools. Preferred 4+ years of combined experience inĀ  CMP.